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A comprehensive study of device variability of sub-5 nm nanosheet transistors and interplay with quantum confinement variation

Crossref DOI link: https://doi.org/10.1007/s11432-021-3399-3

Published Online: 2022-11-04

Published Print: 2023-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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