Enhanced fatigue resistance of ferroelectric Al0.65Sc0.35N deposited by physical vapor deposition
Crossref DOI link: https://doi.org/10.1007/s11432-023-3960-6
Published Online: 2024-04-24
Published Print: 2024-05
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Yang
Yao, Danyang
Liu, Yan
Jiang, Zhi
Wang, Ruiqing
Ran, Xu
Zhou, Jiuren
Wang, Qikun
Wu, Guoqiang
Han, Genquan
Text and Data Mining valid from 2024-04-24
Version of Record valid from 2024-04-24
Article History
Received: 11 September 2023
Revised: 25 November 2023
Accepted: 19 February 2024
First Online: 24 April 2024