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Doping and minority carrier lifetime uniformity of 4H-SiC homoepitaxial layers: role of C/Si ratio distribution

Crossref DOI link: https://doi.org/10.1007/s11432-024-4385-5

Published Online: 2025-09-11

Published Print: 2025-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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