Residual stress of physical vapor-deposited polycrystalline multilayers
Crossref DOI link: https://doi.org/10.1007/s11433-014-5595-x
Published Online: 2014-10-17
Published Print: 2015-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Song
Zhang, Hui
Zheng, LiLi
Text and Data Mining valid from 2014-10-17