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Co-engineered diamond NV centers via MPCVD for non-invasive quantum sensing in integrated circuits

Published Online: 2025-10-23

Published Print: 2026-02

Authors

Zheng, Haoran

Li, Na

Zhang, Zhengfeng

Huang, Jingcheng

Wu, Qilong

Shen, Xuanming

Yu, Huihui

Zhao, Sibo

Qu, Yidian

Wang, Yanan

Li, Dong

Zhang, Yuan

Guo, Xia

Yang, Xun

Du, Guanxiang

Shan, Chongxin
License Information

Text and Data Mining valid from 2025-10-23

Version of Record valid from 2025-10-23
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Article History

Received: 3 May 2025

Accepted: 26 August 2025

First Online: 23 October 2025

Ethics

: Conflict of interest The authors declare that they have no conflict of interest.

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