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High-speed femtosecond laser lithography for low-loss wafer-scale lithium niobate integrated photonics

Crossref DOI link: https://doi.org/10.1007/s11433-025-2849-6

Published Online: 2025-12-11

Published Print: 2026-03

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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