Comprehensive analysis of the influence of structural and dynamic parameters on the accuracy of nano-precision positioning stages
Crossref DOI link: https://doi.org/10.1007/s11465-019-0538-x
Published Online: 2019-05-02
Published Print: 2019-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Liang, Chengyuan
Yuan, Fang
Chen, Xuedong
Jiang, Wei
Zeng, Lizhan
Luo, Xin
Text and Data Mining valid from 2019-05-02
Version of Record valid from 2019-05-02
Article History
Received: 31 January 2019
Accepted: 5 March 2019
First Online: 2 May 2019