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Subsurface damage pattern and formation mechanism of monocrystalline β-Ga2O3 in grinding process

Crossref DOI link: https://doi.org/10.1007/s11465-022-0677-3

Published Online: 2022-06-10

Published Print: 2022-06

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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