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Time of flight improved thermally grown oxide thickness measurement with terahertz spectroscopy

Published Online: 2022-11-04

Published Print: 2022-12

Authors

Zhang, Zhenghao

Huang, Yi

Zhong, Shuncong

Lin, Tingling

Zhong, Yujie

Zeng, Qiuming

Nsengiyumva, Walter

Yu, Yingjie

Peng, Zhike
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Text and Data Mining valid from 2022-11-04

Version of Record valid from 2022-11-04
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Article History

Received: 8 March 2022

Accepted: 6 May 2022

First Online: 4 November 2022

Document is current