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A bionic approach for the mechanical and electrical decoupling of an MEMS capacitive sensor in ultralow force measurement

Published Online: 2023-07-14

Published Print: 2023-06

Authors

Gao, Wendi

Tian, Bian

Liu, Cunlang

Mi, Yingbiao

Jia, Chen

Zhao, Libo

Liu, Tao

Zhu, Nan

Yang, Ping

Lin, Qijing

Jiang, Zhuangde

Sun, Dong
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Text and Data Mining valid from 2023-06-01

Version of Record valid from 2023-06-01
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Article History

Received: 15 July 2022

Accepted: 5 January 2023

First Online: 14 July 2023

Document is current