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Micro/nano functional structure manufacturing from difficult-to-cut materials by etching and its combined machining strategies: A review

Published Online: 2025-09-19

Published Print: 2025-10

Authors

Yao, Xiaoqiang https://orcid.org/0009-0001-7046-6469
Zhou, Tianfeng https://orcid.org/0000-0003-0846-8647
Yang, Xuanzhe

Su, Xinbo

Yu, Qian

Guo, Weijia

Liu, Peng

Zhao, Bin

Wang, Xibin
License Information

Text and Data Mining valid from 2025-09-19

Version of Record valid from 2025-09-19
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Article History

Received: 1 November 2024

Accepted: 19 December 2024

First Online: 19 September 2025

Ethics

: Conflict of Interest The authors declare no conflict of interest.

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