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Authors
Mu, Chunxiao
Cheng, Lei
Song, Zhiyang
Guo, Shaopeng
Li, Ke
Zhang, Song
Jiang, Hao https://orcid.org/0000-0003-0561-5058
Wei, David H.
Zhu, Jinlong
Liu, Shiyuan https://orcid.org/0000-0002-0756-1439
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Article History
Received: 11 March 2025
Accepted: 22 April 2025
First Online: 17 September 2025
Ethics
: Conflict of Interest The authors declare the following: David H. WEI and Song ZHANG have financial interests in Yuwei Optica Co., Ltd., China, a company focusing on computational lithography and holding patents related to technologies for lithography modeling and applications.
