Off Axis Illumination Planar Hyperlens for Non-contacted Deep Subwavelength Demagnifying Lithography
Crossref DOI link: https://doi.org/10.1007/s11468-014-9746-8
Published Online: 2014-09-10
Published Print: 2014-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Wei
Yao, Na
Wang, Changtao
Zhao, Zeyu
Wang, Yanqin
Gao, Ping
Luo, Xiangang
Text and Data Mining valid from 2014-09-10