Machine Allocation in Semiconductor Wafer Fabrication Systems: A Simulation-Based Approach
Crossref DOI link: https://doi.org/10.1007/s11518-023-5558-8
Published Online: 2023-03-08
Published Print: 2023-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Wu, Yanfeng
Chen, Sihua
Text and Data Mining valid from 2023-03-08
Version of Record valid from 2023-03-08
Article History
First Online: 8 March 2023