Thermodynamic analysis of chemical vapor deposition of BCl3-NH3-SiCl4-H2-Ar system
Crossref DOI link: https://doi.org/10.1007/s11595-015-1256-9
Published Online: 2015-10-15
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Li, Zan
Cheng, Laifei
Liu, Yongsheng
Ye, Fang
Text and Data Mining valid from 2015-10-01