Effects of the annealing heating rate on sputtered aluminum oxide films
Crossref DOI link: https://doi.org/10.1007/s11595-017-1565-2
Published Online: 2017-02-12
Published Print: 2017-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Tang, Xiufeng
License valid from 2017-02-01