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Effect of CHF3/Ar Gas Flow Ratio on Self-masking Subwavelength Structures Prepared on Fused Silica Surface

Crossref DOI link: https://doi.org/10.1007/s11595-018-1828-5

Published Online: 2018-05-04

Published Print: 2018-04

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Wu, Jingjun

Ye, Xin

Huang, Jin

Sun, Laixi

Zeng, Yong

Wen, Jibin

Geng, Feng

Yi, Zao

Jiang, Xiaodong

Zhang, Kuibao
License Information

Text and Data Mining valid from 2018-04-01
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Article History

Received: 20 February 2017

Accepted: 25 April 2017

First Online: 4 May 2018