Elimination of Voids at Interface of β-SiC Films and Si Substrate by Laser CVD
Crossref DOI link: https://doi.org/10.1007/s11595-018-1829-4
Published Online: 2018-05-04
Published Print: 2018-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhu, Peipei
Xu, Qingfang
Guo, Han
Tu, Rong
Zhang, Song
Yang, Meijun
Zhang, Lianmeng
Goto, Takashi
Yan, Jiasheng
Li, Shusen
Text and Data Mining valid from 2018-04-01
Article History
Received: 10 June 2017
Accepted: 12 August 2017
First Online: 4 May 2018