Effect of Alcohol-Assisted Annealing on the Quality of Silicon Oxide Thin Film
Crossref DOI link: https://doi.org/10.1007/s11664-014-3133-2
Published Online: 2014-04-22
Published Print: 2014-07
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Ito, Takuya
Ota, Yasuyuki
Shiomori, Koichiro
Nishioka, Kensuke
Text and Data Mining valid from 2014-04-22