Influence of the Viscoelastic Properties of the Polyimide Dielectric Coating on the Wafer Warpage
Crossref DOI link: https://doi.org/10.1007/s11664-014-3255-6
Published Online: 2014-06-07
Published Print: 2014-09
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhu, Chunsheng
Ning, Wenguo
Xu, Gaowei
Luo, Le
Text and Data Mining valid from 2014-06-07
