Molybdenum Oxides Deposited by Modulated Pulse Power Magnetron Sputtering: Stoichiometry as a Function of Process Parameters
Crossref DOI link: https://doi.org/10.1007/s11664-015-3790-9
Published Online: 2015-05-27
Published Print: 2015-10
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Murphy, Neil R.
Sun, Lirong
Grant, John T.
Jones, John G.
Jakubiak, Rachel
Text and Data Mining valid from 2015-05-27