Deposition of Tungsten Thin Films on Flexible Polymer Substrates by Direct-Current Magnetron Sputtering
Crossref DOI link: https://doi.org/10.1007/s11664-015-3936-9
Published Online: 2015-07-23
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Zhang, Rui
Huo, Zhenxuan
Jiao, Xiangquan
Zhong, Hui
Shi, Yu
Funding for this research was provided by:
National Natural Science Foundation of China (61101038, 61471086)
Fundamental Research Funds for the Central Universities (ZYGX2012J031)
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