High-Temperature (1200–1400°C) Dry Oxidation of 3C-SiC on Silicon
Crossref DOI link: https://doi.org/10.1007/s11664-015-3949-4
Published Online: 2015-08-07
Published Print: 2015-11
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Sharma, Y. K.
Li, F.
Jennings, M. R.
Fisher, C. A.
Pérez-Tomás, A.
Thomas, S.
Hamilton, D. P.
Russell, S. A. O.
Mawby, P. A.
Funding for this research was provided by:
ESPRC (RESEE-3065)
Text and Data Mining valid from 2015-08-07