Comparative Study of Cu Films Prepared by DC, High-Power Pulsed and Burst Magnetron Sputtering
Crossref DOI link: https://doi.org/10.1007/s11664-016-4582-6
Published Online: 2016-05-12
Published Print: 2016-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Solovyev, A. A.
Oskirko, V. O.
Semenov, V. A.
Oskomov, K. V.
Rabotkin, S. V.
Funding for this research was provided by:
Russian Foundation for Basic Research (RU)
Text and Data Mining valid from 2016-05-12