High Quality of Liquid Phase-Deposited SiON on GaAs MOS Capacitor with Multiple Treatments
Crossref DOI link: https://doi.org/10.1007/s11664-016-4588-0
Published Online: 2016-05-11
Published Print: 2016-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lee, Ming-Kwei
Yen, Chih-Feng
Yeh, Min-Yen
Text and Data Mining valid from 2016-05-11
