Effect of a Cooling Step Treatment on a High-Voltage GaN LED During ICP Dry Etching
Crossref DOI link: https://doi.org/10.1007/s11664-016-5034-z
Published Online: 2016-10-21
Published Print: 2017-02
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lin, Yen-Sheng
Hsiao, Sheng-Yu
Tseng, Chun-Lung
Shen, Ching-Hsing
Chiang, Jung-Sheng
License valid from 2016-10-21