Fabrication and Characterization of Reactively Sputtered AlInGaN Films with a Cermet Target Containing 5% Al and 7.5% In
Crossref DOI link: https://doi.org/10.1007/s11664-016-5157-2
Published Online: 2016-12-05
Published Print: 2017-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Lin, Kaifan
Kuo, Dong-Hau
Funding for this research was provided by:
Ministry of Science and Technology, Taiwan (MOST 104-2221-E-011-169-MY3)
License valid from 2016-12-05