Optical and Compositional Properties of SiOx Films Deposited by HFCVD: Effect of the Hydrogen Flow
Crossref DOI link: https://doi.org/10.1007/s11664-016-5271-1
Published Online: 2017-01-24
Published Print: 2017-04
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Luna López, J. A.
Vázquez Valerdi, D. E.
Benítez Lara, A.
García Salgado, G.
Hernández-de la Luz, A. D.
Morales Sánchez, A.
Flores Gracia, F. J.
Dominguez, M. A.
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