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Effect of Nitrogen Content on Physical and Chemical Properties of TiN Thin Films Prepared by DC Magnetron Sputtering with Supported Discharge

Crossref DOI link: https://doi.org/10.1007/s11664-017-5608-4

Published Online: 2017-06-05

Published Print: 2017-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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