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Microwave Resistivity of Thermally Oxidized High Resistivity Silicon Wafers

Crossref DOI link: https://doi.org/10.1007/s11664-017-5636-0

Published Online: 2017-06-20

Published Print: 2017-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Judek, Jarosław

Zdrojek, Mariusz

Szmigiel, Dariusz

Krupka, Jerzy
Funding

Funding for this research was provided by:

The National Centre for Research and Development (Graf-Tech/NCBR /13/20/2013)
License Information

License valid from 2017-06-20