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Characterization of Strain Due to Nitrogen Doping Concentration Variations in Heavy Doped 4H-SiC

Crossref DOI link: https://doi.org/10.1007/s11664-017-5846-5

Published Online: 2017-11-01

Published Print: 2018-02

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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