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Inductively Coupled Plasma-Induced Electrical Damage on HgCdTe Etched Surface at Cryogenic Temperatures

Crossref DOI link: https://doi.org/10.1007/s11664-018-6172-2

Published Online: 2018-03-12

Published Print: 2018-10

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Liu, L. F.

Chen, Y. Y.

Ye, Z. H.

Hu, X. N.

Ding, R. J.

He, L.
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Text and Data Mining valid from 2018-03-12
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Article History

Received: 10 November 2017

Accepted: 22 February 2018

First Online: 12 March 2018

Conflict of interest

: The authors declare that they have no conflict of interest.