Influence of Process Parameters and Formation of Highly c-Axis Oriented AlN Thin Films on Mo by Reactive Sputtering
Crossref DOI link: https://doi.org/10.1007/s11664-018-6695-6
Published Online: 2018-09-28
Published Print: 2018-12
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Chauhan, Sandeep Singh
Joglekar, M. M.
Manhas, Sanjeev Kumar
Text and Data Mining valid from 2018-09-28
Article History
Received: 17 May 2018
Accepted: 17 September 2018
First Online: 28 September 2018