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Preparation of Irregular Silica Nanoparticles by the Polymer Templating for Chemical Mechanical Polishing of Sapphire Substrates

Published Online: 2019-05-03

Published Print: 2019-07

Authors

Dong, Yue

Lei, Hong https://orcid.org/0000-0002-8391-243X
Chen, Yi

Liu, Wenqing

Xu, Lei

Wang, Tianxian

Dai, Sanwei
Funding

Funding for this research was provided by:

the National Natural Science Foundation of China (51475279)
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Text and Data Mining valid from 2019-05-03
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Article History

Received: 13 October 2018

Accepted: 23 April 2019

First Online: 3 May 2019

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