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An Assessment of Step Patterned Gate Oxide Superjunction Trench MOSFET for Potential Benefits

Crossref DOI link: https://doi.org/10.1007/s11664-019-07657-x

Published Online: 2019-09-30

Published Print: 2019-12

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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