Ray Tracing Simulation of Images of Dislocations and Inclusions on X-Ray Topographs of GaAs Epitaxial Wafers
Crossref DOI link: https://doi.org/10.1007/s11664-020-07981-7
Published Online: 2020-02-10
Published Print: 2020-06
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Peng, Hongyu http://orcid.org/0000-0002-5601-5928
Ailihumaer, Tuerxun
Raghothamachar, Balaji
Dudley, Michael
Text and Data Mining valid from 2020-02-10
Version of Record valid from 2020-02-10
Article History
Received: 20 September 2019
Accepted: 29 January 2020
First Online: 10 February 2020