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Recognition and Imaging of Point Defect Diffusion, Recombination, and Reaction During Growth of Czochralski-Silicon Crystals

Published Online: 2020-05-20

Published Print: 2020-09

Authors

Hourai, Masataka https://orcid.org/0000-0001-9710-4057
Asayama, Eiichi

Nishikawa, Hideshi

Nishimoto, Manabu

Ono, Toshiaki

Okui, Masahiko
License Information

Text and Data Mining valid from 2020-05-20

Version of Record valid from 2020-05-20
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Article History

Received: 9 December 2019

Accepted: 5 May 2020

First Online: 20 May 2020

Conflict of interest

: The authors declare that they have no conflict of interest.

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