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Photoelastic Characterization of Residual Strain Distribution in Commercial Off-Axis SiC Substrates

Published Online: 2020-05-20

Published Print: 2020-09

Authors

Fukuzawa, Masayuki https://orcid.org/0000-0002-6457-3233
Kanamoto, Kazuki
Funding

Funding for this research was provided by:

Japan Society for the Promotion of Science
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Text and Data Mining valid from 2020-05-20

Version of Record valid from 2020-05-20
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Article History

Received: 17 December 2019

Accepted: 8 May 2020

First Online: 20 May 2020

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