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Microstructural Characterization of Multilayer Metal Stack on InGaAs/InP Contact

Published Online: 2020-05-28

Published Print: 2020-08

Authors

Hsu, Chih-Lin

Wu, Yewchung Sermon

Chen, Szu-Hung

Lin, Kun-Lin https://orcid.org/0000-0003-2462-7812
Funding

Funding for this research was provided by:

Tawian Semiconductor Research Institute (13109A2310)
License Information

Text and Data Mining valid from 2020-05-28

Version of Record valid from 2020-05-28
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Article History

Received: 8 November 2019

Accepted: 15 May 2020

First Online: 28 May 2020

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