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AZ4620 Photoresist as an Alternative Sacrificial Layer for Surface Micromachining

Published Online: 2020-09-14

Published Print: 2020-12

Authors

Minhas, Ashudeep

Bajpai, Anuroop

Mehta, Khushbu

Kumar, Prem

Kumar, Amit

Bansal, Deepak
License Information

Text and Data Mining valid from 2020-09-14

Version of Record valid from 2020-09-14
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Article History

Received: 23 June 2020

Accepted: 20 August 2020

First Online: 14 September 2020

Document is current