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Composition Dependence of Crystal Structures and Electrical Properties of Ca-Mg-Si Films Prepared by Sputtering

Published Online: 2020-10-10

Published Print: 2020-12

Authors

Katagiri, Atsuo

Uehara, Mutsuo

Kurokawa, Mao

Akiyama, Kensuke

Shimizu, Takao

Matsushima, Masaaki

Uchida, Hiroshi

Kimura, Yoshisato

Funakubo, Hiroshi
License Information

Text and Data Mining valid from 2020-10-10

Version of Record valid from 2020-10-10
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Article History

Received: 12 March 2020

Accepted: 22 September 2020

First Online: 10 October 2020

Conflict of interest

: The authors declare that they have no conflict of interest.

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