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Calculation of Phase Diagrams and First-Principles Study of Germanium Impacts on Phosphorus Distribution in Czochralski Silicon

Published Online: 2021-04-21

Published Print: 2021-08

Authors

Dong, Hongqun https://orcid.org/0000-0001-5456-0191
Tao, Xiaoma

Paulasto-Kröckel, Mervi
Funding

Funding for this research was provided by:

Aalto University
License Information

Text and Data Mining valid from 2021-04-21

Version of Record valid from 2021-04-21
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Article History

Received: 21 August 2020

Accepted: 4 March 2021

First Online: 21 April 2021

Conflict of interest

: The authors declare that they have no conflict of interest.

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