Calculation of Phase Diagrams and First-Principles Study of Germanium Impacts on Phosphorus Distribution in Czochralski Silicon
Crossref DOI link: https://doi.org/10.1007/s11664-021-08861-4
Published Online: 2021-04-21
Published Print: 2021-08
Update policy: https://doi.org/10.1007/springer_crossmark_policy
Dong, Hongqun http://orcid.org/0000-0001-5456-0191
Tao, Xiaoma
Paulasto-Kröckel, Mervi
Funding for this research was provided by:
Aalto University
Text and Data Mining valid from 2021-04-21
Version of Record valid from 2021-04-21
Article History
Received: 21 August 2020
Accepted: 4 March 2021
First Online: 21 April 2021
Conflict of interest
: The authors declare that they have no conflict of interest.