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Dry Etching Damage and Alloy Composition Analysis of GaN-Based Semiconductors Using Electron Energy-Loss Spectroscopy

Published Online: 2021-05-03

Published Print: 2021-07

Authors

Yamamoto, Hiroto

Tanaka, Kenichi

Tomiya, Shigetaka

Yamashita, Shunsuke

Ukita, Masakazu

Nakano, Hiroshi

Shirasawa, Raku

Kotera, Masaaki

Funatsu, Kimito
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Text and Data Mining valid from 2021-05-03

Version of Record valid from 2021-05-03
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Article History

Received: 18 September 2020

Accepted: 9 April 2021

First Online: 3 May 2021

Conflict of interest

: The authors declare that they have no conflicts of interest.

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