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Automatic Detection of Basal Plane Dislocations in a 150-mm SiC Epitaxial Wafer by Photoluminescence Imaging and Template-matching Algorithm

Published Online: 2021-11-03

Published Print: 2022-01

Authors

Harada, Shunta https://orcid.org/0000-0002-3076-6678
Tsujimori, Kota

Matsushita, Yosuke
Funding

Funding for this research was provided by:

New Energy and Industrial Technology Development Organization (JPMJTM19CP)
License Information

Text and Data Mining valid from 2021-11-03

Version of Record valid from 2021-11-03
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Article History

Received: 18 August 2021

Accepted: 6 October 2021

First Online: 3 November 2021

Conflict of interest

: On behalf of all authors, the corresponding author states that there is no conflict of interest.

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