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Characterization of Defect Structure in Epilayer Grown on On-Axis SiC by Synchrotron X-ray Topography

Published Online: 2022-01-16

Published Print: 2022-04

Authors

Ishiji, Kotaro https://orcid.org/0000-0003-4736-7347
Kato, Masashi

Sugie, Ryuichi
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Text and Data Mining valid from 2022-01-16

Version of Record valid from 2022-01-16
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Article History

Received: 14 May 2021

Accepted: 29 December 2021

First Online: 16 January 2022

Conflict of interest

: We have no conflict of interest to declare.

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