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Synthesis of Superconductive TaN Thin Films by Reactive DC Sputtering

Crossref DOI link: https://doi.org/10.1007/s11664-022-09721-5

Published Online: 2022-06-07

Published Print: 2022-08

Update policy: https://doi.org/10.1007/springer_crossmark_policy

Authors

Nieto, A. https://orcid.org/0000-0002-5065-1050
Guzmán, M.

Conde-Gallardo, A.

Contreras, O.
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Text and Data Mining valid from 2022-06-07

Version of Record valid from 2022-06-07
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Article History

Received: 15 July 2021

Accepted: 18 May 2022

First Online: 7 June 2022

Conflict of Interest

: The authors declare that they have no conflict of interest.