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Performance Enhancement of In2O3 Thin-Film Transistors via Multi-Spin Coating Combined with UV-Assisted Thermal Annealing

Published Online: 2022-08-18

Published Print: 2022-11

Authors

Chen, Shujian

Luo, Yu

Liang, Jun

Pei, Yanli https://orcid.org/0000-0003-3456-0746
Funding

Funding for this research was provided by:

Natural Science Foundation of China (61774172)

Science and Technology Project of Guangdong Province (2019B010132002)

Shenzhen Science and Technology Innovation Committee in 2018 (KQJSCX20180323174713505)
License Information

Text and Data Mining valid from 2022-08-18

Version of Record valid from 2022-08-18
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Article History

Received: 14 March 2022

Accepted: 20 June 2022

First Online: 18 August 2022

Conflict of interest

: The authors declare no conflict of interest.

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