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Micro- and Nanostructure Analysis of Vapor-Phase-Grown AlN on Face-to-Face Annealed Sputtered AlN/Nanopatterned Sapphire Substrate Templates

Published Online: 2023-03-29

Published Print: 2023-08

Authors

Nakanishi, Yudai https://orcid.org/0000-0003-2492-7196
Hayashi, Yusuke

Hamachi, Takeaki

Tohei, Tetsuya

Nakajima, Yoshikata

Xiao, Shiyu

Shojiki, Kanako

Miyake, Hideto

Sakai, Akira
Funding

Funding for this research was provided by:

Japan Society for the Promotion of Science (JP16H06415, JP16H06423, JP19K15025, JP19K15045, JP22H01970, JP22KK0055)

Advanced Characterization Nanotechnology Platform, Nanotechnology Platform Program of MEXT (JPMXP09A21OS0036)
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Text and Data Mining valid from 2023-03-29

Version of Record valid from 2023-03-29
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Article History

Received: 12 December 2022

Accepted: 2 March 2023

First Online: 29 March 2023

Conflict of interest

: The authors declare that they have no conflict of interest.

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