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Improving Surface Structures of Al-Doped Zinc Oxide Thin Films to Apply in CO Gas-Sensing Property by Designing Processes Through RF Magnetron Sputtering

Crossref DOI link: https://doi.org/10.1007/s11664-024-10983-4

Published Online: 2024-03-02

Published Print: 2024-05

Update policy: https://doi.org/10.1007/springer_crossmark_policy

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