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Influence of Zr Doping on Electrical and Dielectric Properties of Spin-Coated Hafnia Films for CMOS Applications

Published Online: 2024-12-24

Published Print: 2025-03

Authors

Sabhya,

Kekuda, Dhananjaya

Rao, K. Mohan
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Text and Data Mining valid from 2024-12-24

Version of Record valid from 2024-12-24
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Article History

Received: 27 June 2024

Accepted: 5 December 2024

First Online: 24 December 2024

Declarations

:

: The authors declare that they have no conflict of interest.

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